Roll to Roll System for R&D (Vacuum Deposition)
Roll to Roll system is essential to manifacture flexible substrates for thin film solar cells, touch panels, organic LCD (liquid Crystal Display),etc. at low cost. To realize the system, however, a lot of R&D are required. We offer a best R&D system for this purpose.
Click here to Japanese page
Flexible film substrate for thin film solar cell, touch panel, LCD (Liquid Crystal Display),etc.
R&D for coating, surface treament/improvement on thin film flexible substrates (PET, PI, thin metal film, etc.), and R&D for their manifacturing process.
*１．The system above is a typical sample, and could be changed in any way to meet your requirements. ２．RBP：Roots Blower Pump、DRP：Dry Pump、TMP：Turbo Molecular Pump
Vacuum Deposition, PVD(Physical Vapour Deposition), CVD(Chemical Vapour Deposition), Sputtering, Etching, PlasmaCleaning, etc
	Any other equipment/process could be incorporated to meet your requirements. Exising equipments on your hand could be used.
Web Material (1)Flexible Web (PET, PI, Metal Thin Film, etc.) (2)Web Width: 150〜300mm(max.) (3)Web Thickness: 25〜200μm (4)Web Roll Diameter:Standrd 300mm Winding system Roll to Roll Winding Winding speed:0.1〜10m/min Web speed control, Web tension control Coating Drum Temp. Control System Cooled with specified Chiller Unit Temperature Control Range:-10℃〜+80℃(tenntative) Pre-Treatment Panel Heating for Web Max. 200℃ Sputter Equipment (1)Sputter Cathode: Dual Magnetron 2 sets (internal type) (2)Power Supply: MF (Medium Frequency)type 2 sets (3)Process Gas Feeding Unit: 2 sets (Ar､O2､:2Lines) (4)Plasma Emission Monitor: 1set Vacuum Pumping system (1)Main Pump : TMP(Turbo Molecular Pump) 4 sets      Web Zone : 3,000l/sec x2 sets      Sputter Zone : 1,000l/sec x2 sets (2)Rough Pumping Line: RBP (Roots Blower Pump)+DRP(Dry Pump) (3)Cryo Cooler: 2 lines Vacuum Chamber Material : Stainless Steel Front Door : with Hinge Rear Door : Slidimg type for Maintenance & Target Exchange Main Body Size D3,600xW5,000xH3,000mm(max.) Excluding periferal systems((Rough Line Pump, Cryo Cooler,Power Supply)
We have abundant experiences on vacuum deposition technology, and shown above is just a sample. We could meet any requirements which you may have. We could also accept modification of your system/equipment.
Roll to Roll system is essential to manifacture flexible film substrates for thin film solar cell, touch panel, LCD (Liquid Crystal Display), EL (Electroluminescence), organic EL, TFT (Thin Film Transistor), FPD (Flat Panel Display), and other type displays at low cost. To realize it, however, a lots of R&D are required. In addition, periferal technology, like vacuum deposition, coaing, sputtering, plasma cleanig, etching, CVD, PECVD, PVD, etc. are needed. Don't hesitate to ask us any problems witch you may have.

TOP >  取扱商品 >  FPD製造装置 >  ロール・ツー・ロール実験装置