●Feature
This stage has 1520 ｘ 1900mm stroke but installation area is small because of gantry type. Repeatability is 1μm and resolution is 0.1μm. It is suitable for manufacturing and inspection of LCD and PDP etc.

●Specifications
Drive/Guide system： High thrust linear motor, Rolling guidance
Stroke： 1,520ｘ1,900mm
Scale resolution： 0.1μm
Repeatability： ±１μm
Speed： max. 800mm/sec
Installation area： 2,300x2,800mm

Large size High-Speed HighPprecise XY Stage
Drive： linear motor
Stroke： 2,000ｘ2,000mm
Speed： max. 2,500mm/sec
Straightness ：±1.5μm

●Feature
The light is irradiated from lower part and the transmitted light is inspected at upper part in this system. Image processing software is also available. Stroke of 2000 x 2000mm is also possible.

●Example of Specificaiton
Inspection area： 500x400mm
Working area： 520x420mm
Rrepeatability： ±10μm
Resolution： ±1μm
Speed： max. 50mm/sec

High Precision XY Stage for IC Wafer and Eloectric Components

●Feature
It is the example of an actual result of the stage which pursued the limit o fmechanism accuracy.

１．300mm Wafer High Precision Obsevation Equipment
　XY stage：Stroke 300mm （Option 400mm）
　Measurement Scale： linear Scale
　Placeability： Standard 3μm
　Repeatability： ±１μm

２．Nano meter stage with Ball Screw
　Stroke： 300〜500mm
　Feeding： Standard  min. 100nm、Minute  5nm